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Achromatization

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A`chro`ma`ti`za´tion
n.1.The act or process of achromatizing.


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A key difference from ASML's established 248 nm PAS 5500/500 Step & Scan product is the use of Carl Zeiss' new Starlith(TM) 900 lens with calcium fluoride (CaF2) elements for partial achromatization.
ASML Introduces Industry's First Wide-Field, 193 nm Step & Scan ... by Business Wire
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