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Bosch process

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Bosch process
n
(Engineering / Chemical Engineering) Obsolete an industrial process for manufacturing hydrogen by the catalytic reduction of steam with carbon monoxide
[named after Carl Bosch (1874-1940), German chemist]
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Current challenges for DRIE are the removal of polymer after Bosch process, sidewall roughness, end-point detection, reproducibility & reliability and increased etch rate.
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Current challenges for DRIE are the removal of polymer after Bosch process, sidewall roughness, end-point detection, reproducibility & reliability and increased etch rate.
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