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epitaxy |
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The new process technology enables the production of four-inch epitaxial wafers with high quality, which is not possible with the conventional MOCVD process. Participants in the round-robin include laser manufacturers, epitaxial film suppliers, and measurement instrumentation manufacturers. The new material-saving technique called epitaxial liftoff may solve these problems, say researchers at Bell Communications Research (Bellcore), in Red Bank, N. |
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