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Faraday shield

   Also found in: Wikipedia 0.04 sec.
Faraday shield
See Faraday cage.
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Specifically addressing customer requirements for controlling charge damage, contamination drive-in, and residue removal while maintaining extremely high strip rates, ICP technology uses an electrostatic Faraday shield to eliminate capacitively coupled power and control electron energy distribution in the plasma.
Mattson Technology Unveils Low Temperature Stripping at SEMICON ... by Business Wire
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