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getter |
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We believe this butterfly is the only gettering process which can work in times on the order of seconds,' says Lagowski. Some of his interests lie in the areas of gettering of silicon, development of low-k IMD films, CVD and High Density Plasma Deposition, X-ray Diffraction (XRD), Atomic Force Microscopy (AFM) and Fourier Transform Infrared Microscopy (FTIR). Some of his interests lie in the areas of gettering of silicon, development of low-k IMD films, CVD and High Density Plasma Deposition, X-ray Diffraction (XRD), Atomic Force Microscopy (AFM) and Fourier Transform Infrared Microscopy (FTIR). |
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