ion beam

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Noun1.ion beam - a beam of ions moving in the same direction at the same speed
particle beam - a collimated flow of particles (atoms or electrons or molecules)
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Contract award: research facility for reactive ion beam etching (ribe reactive ion beam etching).
Delivery and operational hand-over of a plant for ion beam etching of wafers and supported single substrates up to a diameter of 150 mm for installation in vacuum technology laboratory of the Institute for Solid State Electronics at TU DresdenKey requirements - Ion source: filament-ion source, the long-term stabilityIBE, RIBE and CAIBE processes possible.
Contract notice: Research facility for reactive ion beam etching (ribe reactive ion beam etching).