microelectromechanical systems

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References in periodicals archive ?
Micro-electro-mechanical-systems (MEMS), also called micromachines or micro systems technology, are miniaturized electro-mechanical systems.
CTR (Carinthian Tech Research AG) was the first K plus research center in Austria and performs industry-oriented research and development in the area of optics, sensors and micro systems technology.
Company description: The Fraunhofer IPMS carries out customer specific developments in fields of microelectronic and micro systems technology.