MEMS

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MEMS

 (mĕmz)
n.
1. (used with a sing. verb) A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
2. (used with a pl. verb) Devices, machines, or systems fabricated using this technology.

[m(icro)e(lectro)m(echanical) s(ystems).]

MEMS adj.
References in periodicals archive ?
This is just the beginning," says Roukes, who sees the electrometer as a demonstration of what an integrated microelectromechanical system can do (SN: 7/26/97, p.
Nasdaq: ASYS), a global supplier of production and automation systems and related supplies for the semiconductor, silicon wafer, solar cell, and microelectromechanical system (MEMS) industries, today announced two orders totaling $3 million from the solar cell industry for Tempress(TM) brand diffusion furnace systems.
Microelectromechanical systems (MEMS) promises exciting solutions for a myriad of applications by allowing the micro-scale integration of mechanical elements with supporting integrated circuits.
The first microelectromechanical systems (MEMS) standards in the world will be published in the Annual Book of ASTM Standards this summer.
NEW YORK -- Microelectromechanical systems (MEMS) promise to revolutionize a multitude of product categories by uniting silicon-based microelectronics and micromachining technology.
MEMS stands for microelectromechanical systems, which combine tiny mechanical components, such as gears and levers, with microelectronic circuitry (SN: 7/22/00, p.
The world microelectromechanical systems (MEMS) sensors market is poised for robust growth due to demand from key vertical segments, such as automotive and consumer electronics.
Department of Commerce's Advanced Technology Program (ATP) to develop embedded digital interface and control circuits for MicroElectroMechanical Systems (MEMS).
XCOM), an award-winning developer of radio frequency (RF) products, has selected Innovative Micro Technology (IMT), the leading MicroElectroMechanical Systems (MEMS) contract manufacturer, to manufacture die for their RF MEMS Relay product.
The NIST ATP project will develop prototype microscale assemblers using microelectromechanical systems (MEMS), extend the capabilities to nanometer geometries, and develop nanoelectromechanical systems (NEMS) for prototype nanoscale assemblers.
Ultimately, they hope to apply what they learn from the insects to computer chip manufacturing and the assembly of microelectromechanical systems (SN: 7/26/97, p.
He directed the design and construction of a vacuum microprobe system for developing and testing microelectromechanical systems (MEMS) in vacuum conditions for space applications.