planar process

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planar process

n
(Electronics) a method of producing diffused junctions in semiconductor devices. A pattern of holes is etched into an oxide layer formed on a silicon substrate, into which impurities are diffused through the holes
Collins English Dictionary – Complete and Unabridged, 12th Edition 2014 © HarperCollins Publishers 1991, 1994, 1998, 2000, 2003, 2006, 2007, 2009, 2011, 2014
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Fairchild's founders, Fu said, invented the thin-film-deposition planar process that enables the monolithic integrated circuit as we know it today.
Raymont added that the GeoMelt in-situ sub-surface planar process "is unique and especially valuable for large applications, such as treatment of large quantities of contaminated soils found at sites like the Fukushima Prefecture in Japan, mining sites, or weapons complex sites."
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