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anisotropically |
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Key statement: An anisotropically conductive sheet capable of holding a charge in its surfaces under an unpressurized state, and moving the charge in a thickness-wise direction in a state pressurized in the thickness-wise direction. 3] were found to expand linearly but anisotropically (32). While the new system's primary market is etching thin-film heads, its applications in semiconductor manufacturing include anisotropically patterning virtually any microelectronic material or stack of materials including PZT (lead zirconium titanate), BST (barium strontium titanate), III-V compounds and etch-resistant inert metals including copper, gold and platinum. |
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