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cupric sulfate |
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| The substrate is first "derivitized" with a sub-mono-layer coverage of catalyst and then transferred for electroplating in a cupric sulfate electrolyte containing an inhibitor. Recently NIST researchers have demonstrated superconformal electrodeposition of copper in 500 nm deep trenches ranging from 500 nm to 90 nm in width using an acid cupric sulfate electrolyte containing chloride (Cl), polyethylene glycol (PEG), and 3-mercapto-1-propanesulfonate (MPSA). |
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