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dielectric constant |
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The parasitic capacitance of 140nm-pitched lines was reduced to the world's lowest at 85fF/mm, with the effective dielectric constant keff=2. The extent of the reaction was proportional to the acrylonitrile concentration and the reaction time, as was the dielectric constant. The best end product so far, using 30% keratin by weight, has a lower dielectric constant than conventional semiconductor insulator materials such as silicon dioxide or polyimides. |
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