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dopant |
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Most interpretations of optical measurements on compound semiconductors such as GaSb require physical models and associated input parameters that describe how carrier densities vary with dopant concentrations and measured Fermi energies. For high energy implants, the VIISta 3000 provides additional accuracy in the placement of dopant species to enhance well-to-well isolation characteristics, reducing the size of the transistors and increasing the number of integrated circuits on the wafer. Chen and his colleagues at Rowland and the Chinese Academy of Sciences in Beijing, however, report a step toward finer dopant control. |
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