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ionised |
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In these transitions the atom is doubly ionised and the actual vacancy transition is still 1s [right arrow] 2p, but the second vacancy in the 3d level is not directly involved in the transition. At Semicon West we introduced a new ionised PVD module for barrier deposition with what we believe to be unique features and benefits over existing ionised PVD solutions and at considerably lower cost than alternative CVD techniques. |
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