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lock chamber

   Also found in: Encyclopedia, Wikipedia, Hutchinson 0.15 sec.
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Noun1.lock chamberlock chamber - enclosure consisting of a section of canal that can be closed to control the water level; used to raise or lower vessels that pass through it
lock
canal - long and narrow strip of water made for boats or for irrigation
enclosure - a structure consisting of an area that has been enclosed for some purpose
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Magically; as if someone said, "Open, Sesame," the giant doors swing back, and the group paddles into the lock chamber.
Blueways and Greenways, connecting communities: a small federal ... by Dolesh, Richard / Parks & Recreation
Already widely used on 300mm deposition and etch process tools, Chambergard fast vent diffuser technology has been shown to reduce the time required to vent the load lock chamber by 65 percent on installed 200mm tools, while offering a significant improvement in particle reduction.
Entegris Chambergard(TM) Diffuser Technology Provides Throughput ... by Business Wire
The system's unique downstream microwave chamber design provides consistent strip rates, high process uniformity and excellent selectivity to low-k materials, while integrated load lock chambers ensure process integrity.
Axcelis Introduces Photoresist Dry Strip System for Low-k Dielectrics by Business Wire
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