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silicide
(redirected from silicides)

   Also found in: Encyclopedia, Wikipedia 0.01 sec.
sil·i·cide  (sl-sd)
n.
A compound of silicon with another element or radical.

silicide [ˈsɪlɪˌsaɪd]
n
(Chemistry / Elements & Compounds) any one of a class of binary compounds formed between silicon and certain metals
ThesaurusLegend:  Synonyms Related Words Antonyms
Noun1.silicide - any of various compounds of silicon with a more electropositive element or radical
chemical compound, compound - (chemistry) a substance formed by chemical union of two or more elements or ingredients in definite proportion by weight


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The results indicated that niobium silicides could be formed at the beginning, which blocked further reactions between carbon and niobium to form niobium carbides.
Chapters are in sections on a review of the field, wafer parameter tuning and defects, surface preparation and gate dielectrics, USJ formation and metrology, advanced silicides formation, pattern effects, temperature measurement, and flash annealing for ULSI and beyond Si.
This gives both logic and memory device makers the ability to cover the full array of advanced thermal processing applications in transistor formation, including anneals for ultra shallow junctions, dry oxidation, silicides, shallow trench isolation (STI) oxides, and boron-doped phosphosilicate glass (BPSG) and titanium nitride (TiN) densification.
 
 
 
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