MEMS

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MEMS

 (mĕmz)
n.
1. (used with a sing. verb) A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
2. (used with a pl. verb) Devices, machines, or systems fabricated using this technology.

[m(icro)e(lectro)m(echanical) s(ystems).]

MEMS adj.