MEMS


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MEMS

 (mĕmz)
n.
1. (used with a sing. verb) A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
2. (used with a pl. verb) Devices, machines, or systems fabricated using this technology.

[m(icro)e(lectro)m(echanical) s(ystems).]

MEMS adj.
References in periodicals archive ?
IntelliSense develops and markets IntelliSuite, the market leading CAD tools for MEMS process modeling and MEMS device and system analysis.
MEMS modeling/simulation efforts allow the exploration and optimization of new device designs in a very cost-effective manner.
That's why IMEC and SUSS MicroTec will collaborate closely to develop innovative bonding technologies that will not influence the performance of these sensitive devices that MEMS are.
Fujitsu's development depends on MEMS mirrors to bounce light beams.
The Xerox MEMS waveguide shuttle acts like a miniature train track switch for the fine waveguides, avoiding the problems of earlier, mirror-based MEMS switches.
The project will apply a robust algorithm able to handle these variations using an application-specific integrated circuit (ASIC) chip with ultrahigh control bandwidth density for precise control of the MEMS actuators.
Zyvex will design, test, and characterize microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), create assembled micro- and nanosystems, and develop software for MEMS design, verification, visualization, and simulation.