silane(redirected from Monosilane)
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1. A pungent flammable gas, SiH4, that is toxic and irritating, used in the manufacture of semiconductors.
2. Any of a group of silicon hydrides having the general formula SinH2n+2 that are analogous to the alkanes.
(Elements & Compounds) a colourless gas containing silicon
1. a gas with an unpleasant odor, SiH4, soluble in water: used as a dopant for semiconductors in the production of solid-state devices.
2. any of a class of silicon hydrides analogous to the alkanes.