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Related to Optical lithography: Electron beam lithography


A planographic printing process using plates made according to a photographic image.

pho′to·lith′o·graph′ic (-lĭth′ə-grăf′ĭk) adj.
pho′to·lith′o·graph′i·cal·ly adv.
American Heritage® Dictionary of the English Language, Fifth Edition. Copyright © 2016 by Houghton Mifflin Harcourt Publishing Company. Published by Houghton Mifflin Harcourt Publishing Company. All rights reserved.


1. (Printing, Lithography & Bookbinding) a lithographic printing process using photographically made plates. Often shortened to: photolitho
2. (Electronics) electronics a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion process. See also planar process
ˌphotoliˈthographer n
photolithographic adj
ˌphotoˌlithoˈgraphically adv
Collins English Dictionary – Complete and Unabridged, 12th Edition 2014 © HarperCollins Publishers 1991, 1994, 1998, 2000, 2003, 2006, 2007, 2009, 2011, 2014


(ˌfoʊ toʊ lɪˈθɒg rə fi)

1. the technique or art of making photolithographs.
2. a process whereby integrated and printed circuits are produced by photographing the circuit pattern on a photosensitive substrate and chemically etching away the background.
pho`to•li•thog′ra•pher, n.
Random House Kernerman Webster's College Dictionary, © 2010 K Dictionaries Ltd. Copyright 2005, 1997, 1991 by Random House, Inc. All rights reserved.


the process of making lithographs produced by photoengraving. Cf. photogravure. — photolithographer, n.photolithographic, adj.
See also: Photography
the process of making lithographs produced by photoengraving. Cf. photogravure. — photolithographer, n. — photolithographic, adj.
See also: Engraving
-Ologies & -Isms. Copyright 2008 The Gale Group, Inc. All rights reserved.
ThesaurusAntonymsRelated WordsSynonymsLegend:
Noun1.photolithography - a planographic printing process using plates made from a photographic image
lithography - a method of planographic printing from a metal or stone surface
Based on WordNet 3.0, Farlex clipart collection. © 2003-2012 Princeton University, Farlex Inc.


[ˌfəʊtəʊlɪˈθɒgrəfɪ] Nfotolitografía f
Collins Spanish Dictionary - Complete and Unabridged 8th Edition 2005 © William Collins Sons & Co. Ltd. 1971, 1988 © HarperCollins Publishers 1992, 1993, 1996, 1997, 2000, 2003, 2005
References in periodicals archive ?
The method--developed by Graphene Flagship researchers Camilla Coletti from Istituto Italiano di Tecnologia (IIT) and Marco Romagnoli from Consorzio Nazionale Interuniversitario per le Telecomunicazioni (CNIT) both working in Italy--is designed to grow single graphene crystals by chemical vapor deposition on copper "seeds" deposited using optical lithography.
SMEE is the world's fourth and China's only company with system design and integration testing capabilities in high-end optical lithography equipment, often known as the jewel in the crown of the integrated circuit (IC) and semiconductor value chain.
Optical lithography is an indispensable technique for the mass production of microstructures such as semiconductor devices.
Only the Computer Holography Centre (Moscow), CSIRO (Melbourne Australia), Dai Nippon (Japan) and Intaglio (Czech Republic) had systems for optical lithography.
Optical lithography or photolithography has been the workhorse of semiconductor nanofabrication, which uses light, optics, and photosensitive materials to produce minuscule patterns on a surface; repeated deposition and etching away of thin layers of that photosensitive material result in the fabrication of devices with nanoscale features.
Resist-based lithography uses organic and inorganic polymer films as sacrificial layers (usually spin-coated) that undergo chemical bond dissociation or formation due to interaction with secondary electrons in case of exposure to a particle beam (or with photons in case of optical lithography).
Huang, "Fabrication of texturing antireflection structures in solar cells by using the defocusing exposure in optical lithography," Journal of the Electrochemical Society, vol.
In addition it is important to take into account that the screen-printing method can be also combined with microfabrication techniques as optical lithography. Specifically, the optical lithography is a technique used to produce patterns in micro/nanoscale into the integrated circuits.
He said the programs will help secure and accelerate EUV development activities, in parallel with the necessary focus on improved performance of existing optical lithography tools and speed up the deployment of new technologies for 450-millimeter wafers.
IC firms over lithography For years, IC manufacturers were concerned that optical lithography would reach its technological limits and the industry would no longer be able to continue shrinking features on IC chips.
Previously published in 2001 and 2005, this edition takes account of the movement of immersion lithography from development into volume manufacturing, the development of double patterning methods to maintain scaling using optical lithography, development pilot lines, and other recent innovations.