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Related to Optical lithography: Electron beam lithography


A planographic printing process using plates made according to a photographic image.

pho′to·lith′o·graph′ic (-lĭth′ə-grăf′ĭk) adj.
pho′to·lith′o·graph′i·cal·ly adv.


1. (Printing, Lithography & Bookbinding) a lithographic printing process using photographically made plates. Often shortened to: photolitho
2. (Electronics) electronics a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion process. See also planar process
ˌphotoliˈthographer n
photolithographic adj
ˌphotoˌlithoˈgraphically adv


(ˌfoʊ toʊ lɪˈθɒg rə fi)

1. the technique or art of making photolithographs.
2. a process whereby integrated and printed circuits are produced by photographing the circuit pattern on a photosensitive substrate and chemically etching away the background.
pho`to•li•thog′ra•pher, n.


the process of making lithographs produced by photoengraving. Cf. photogravure. — photolithographer, n.photolithographic, adj.
See also: Photography
the process of making lithographs produced by photoengraving. Cf. photogravure. — photolithographer, n. — photolithographic, adj.
See also: Engraving
ThesaurusAntonymsRelated WordsSynonymsLegend:
Noun1.photolithography - a planographic printing process using plates made from a photographic image
lithography - a method of planographic printing from a metal or stone surface


[ˌfəʊtəʊlɪˈθɒgrəfɪ] Nfotolitografía f
References in periodicals archive ?
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who works in microlithography and is editor of the Journal of Micro/Nanolithography, MEMS, and MOEMS, explains the basic equations and constants of optical lithography, the basics of exposure systems and image formation, and system components, processing, and optimization.
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In the past, all individual samples of RM 8090 or SRM 2090 were made by direct write electron-beam lithography, because optical lithography did not have the required resolution.
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An officer of a lithography company who teaches a graduate-level course on optical lithography (U.
This is a difficult problem given that there are about 20 such lens elements in a typical stepper or optical lithography lens.
Provide the following sets of equipment for the laboratory of targets: vacuum deposition equipment, equipment for optical lithography, x-ray diffractometer, scanning electron microscopy with electron microanalysis system, optical microscopes and accessories, spectrophotometer, stereoscopic optical microscope, interferometer white light and accessories.