Figure 2(a) shows that the PL from a sample with Si-NCs (synthesized by method A), ater Ag
ion implantation at 1 MeV, is then annealed at 600[degrees]C in RA for 1 h.
Chu et al.[52] described the recent applications of plasma immersion
ion implantation (PIII) to the surface modification of NiTi orthopedic materials.
Key words: cutting tools, cardboard products, press production, PVD process,
ion implantationThe patent covers Varian Semiconductor's control system, known as VCS, for VIISta
ion implantation systems.
The new Quantum
ion implantation system uses a new, small footprint platform that bridges 200mm and 300mm wafer sizes.
The combination will add
ion implantation technology to Applied Materialsa[euro](tm) portfolio, strengthening its position in wafer fabrication equipment, the buyer said.
Surface modification techniques include the following:
ion implantation or deposition of ceramic layers (TiN, DLC, [Al.sub.2][O.sub.3], Zr[O.sub.2]), by plasma spraying, chemical vapour deposition (CVD), physical vapour deposition (PVD) etc (de Groot et al, 1998).
Coverage also encompasses decreasing defect densities; controlling surface morphology, residual impurities, and extended defects; device processing technologies, including
ion implantation, oxidation, etching and contacts; and developing, fabricating, and testing device structures and concepts.
Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of
ion implantation, rapid thermal processing, and cleaning and curing systems.