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1. (used with a sing. verb) A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
2. (used with a pl. verb) Devices, machines, or systems fabricated using this technology.
American Heritage® Dictionary of the English Language, Fifth Edition. Copyright © 2016 by Houghton Mifflin Harcourt Publishing Company. Published by Houghton Mifflin Harcourt Publishing Company. All rights reserved.