MEMS

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MEMS

 (mĕmz)
n.
1. (used with a sing. verb) A technology that combines tiny electronic and mechanical parts to create systems with moving parts on a scale ranging from microns to a millimeter, typically using silicon or silicon-based fabrication methods.
2. (used with a pl. verb) Devices, machines, or systems fabricated using this technology.

[m(icro)e(lectro)m(echanical) s(ystems).]

MEMS adj.
References in periodicals archive ?
The application of wireless networks technology beside embedded system led to advent of micromechanical system technology in which microprocessors, sensors and telecommunication circuits have been placed in a system and they pursue one goal together and by the use of some of these system together, a network has been achieved which is the solution of many everyday and necessary needs.
In the sensor there is micromechanical system with Si springs and beams.
Research shows that the properties and use-life of ultra-precision machinery and micromechanical system, to a large extent, depend on the friction and wear properties.
2, 5 or 15 kHz) reveal that this micromechanical system can produce several different patterns of deflection that are reminiscent of the movements of a flexible seesaw (Fig.
The UMIR-CAM is based on the revolutionary idea that stress caused by the absorption of photons can be detected in a bimaterial micromechanical system.